Like a regular mechatronics approach, a MEMS machine constitutes of a micro sensor to experience a selected variable of our environment and converts the variable to an electric sign. This electric sign is processed through microelectronics which therefore controls a micro-actuator to supply the necessary swap in environment.
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Extra info for A Introduction to Microelectromechanical System (MEMS): ZigBee SystemTechnology
A Introduction to Microelectromechanical System (MEMS): ZigBee SystemTechnology